HR FESEM With EDAX

  • The High resolution field emission scanning electron microscope (HR FESEM) is from Zeiss, model name ULTRA Plus. It comes with a GeminiÒ column that offers a theoretical resolution of 1.0 nm at 15 kV. It has an Everhart-Thornley detector for secondary electrons and an in-lens annular SE detector. In addition, an angle and energy selective EsB detector is also present. The sample stage is a 5-axes motorized eucentric stage with a specimen chamber with 330 mm diameter. There is also a sputter coater for coating non-conductive samples with gold, platinum or carbon. The Energy Dispersive X-ray spectrometer (EDAX) is manufactured by Oxford Instruments Nanoanalysis. It has a 50 mm2 Silicon Drift Detector that does not require liquid nitrogen cooling. It can detect elements from Boron onwards and has a Mn Ka resolution of 127 eV or better. Its operation is controlled by a different software (INCA).

Team